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Optimizing illumination for precise multi-parameter estimations in coherent diffractive imaging

Coherent diffractive imaging (CDI) is widely used to characterize structured samples from measurements of diffracting intensity patterns. We introduce a numerical framework to quantify the precision that can be achieved when estimating any given set of parameters characterizing a sparse sample from measured data. To that end, we consider a real-space parametrization of an object composed of three lines. We determine the optimal probe positions for a Gaussian incident field and the optimal design for a zone plate shaping the incident field. These results offer new insights to improve the performance of methods based on sparsity-based CDI when the dose per acquisition may be limited, notably for the characterization of delicate samples or when high throughput is required. 

D. Bouchet, J. Seifert and A.P. Mosk, Optics Letters 46 (2), 254-257 (2021).